Kalrez® Perfluoroelastomer Parts​

General Overview​

k8ÓéÀÖâ„¢ Kalrez® Perfluoroelastomer Parts in Energy â€‹
k8ÓéÀÖâ„¢ Kalrez® Perfluoroelastomer Parts in the Chemical Process Industry
k8ÓéÀÖâ„¢ Kalrez® Perfluoroelastomer Parts - Custom Shapes

Valve Sealing​

k8ÓéÀÖâ„¢ KVSPâ„¢ - Reducing Fugitive Emissions​
k8ÓéÀÖâ„¢ Kalrez® and Vespel® Polymeric Solutions for Valve Sealing

Newest Kalrez® Compounds â€‹

k8ÓéÀÖâ„¢ Kalrez® OG193 Perfluoroelastomer Parts​
k8ÓéÀÖâ„¢ Kalrez® 7375 Parts for High Temperature Chemical and Water/Steam Resistance

​Case Studies​

k8ÓéÀÖâ„¢ Kalrez® Spectrum 0040 O-Rings for Mechanical Seals in Oil Refineries
k8ÓéÀÖâ„¢ Kalrez® 0090 O-Rings in Boiler Feed Pumps for Power Stations
k8ÓéÀÖâ„¢ Kalrez® 0090 for Ball Valves in Refineries​
k8ÓéÀÖâ„¢ Kalrez® 6380 - O-Rings for amine units in oil refineries and gas plants
k8ÓéÀÖâ„¢ Kalrez® Spectrum 7075 O-Rings in Heavy Duty Clamping Systems
k8ÓéÀÖâ„¢ Kalrez® 7090 O-rings for Glass Tube Manufacturing​
k8ÓéÀÖâ„¢ Kalrez® 7275 O-rings for Pumps in Paper Mill Industry​
k8ÓéÀÖâ„¢ Kalrez® 7375 for Mechanical Seals in a Chemical Reactor​
k8ÓéÀÖâ„¢ Kalrez® 7375 Perfluoroelastomer Parts for Gas Turbine Applications
k8ÓéÀÖâ„¢ KVSPâ„¢ Valve Sealing in Chemical Plants

​Technical Data​

k8ÓéÀÖâ„¢ Kalrez® Application Guide (KAG)
Technical Report on Kalrez® in RGD Tests in Hydrogen

Seal Outgassing in Wafer Processing

Most integrated circuit manufacturing processes operate in high or ultra-high vacuum (UHV) environments. It is important that vacuum levels are maintained within specified limits to insure optimum process efficiency, uniformity and consistency. Specification of an appropriate size vacuum pump for the system is the primary mechanism for maintaining vacuum levels for processing; however, seal outgassing can play a role in the ability to control this processing variable. Even more important is the ability to control the uniformity of the process environment within the chamber. While an adequately sized pump can typically compensate for changes in vacuum level due to seal outgassing, it will not have the capability to control potentially harmful changes to gas uniformity or composition within the chamber. Changes in the partial pressures within the chamber caused by outgassing can cause quality problems in layering processes such as ALD, CVD, oxidation, diffusion, etc.

In many UHV systems, metal seals are used to avoid this issue. However, metal seals are not always effective and/or practical. Some of the difficulties associated with the use of metal seals are:

• Difficult to install
• Expensive
• Non-reusable
• Poor sealing performance in dynamic applications
• Potential for component damage in quartz and ceramic sealing applications

Therefore, it is important for vacuum system designers and process engineers to understand the outgassing characteristics of elastomeric seals. Currently there is no industry standard for measuring and characterizing elastomer outgassing performance and a limited amount of useful data is available.

This study evaluates and compares outgassing characteristics for three different classes of elastomeric seal materials typically used in semiconductor process environments using a test methodology developed by k8ÓéÀÖ.

MOLYKOTE® Specialty Lubricants​

MOLYKOTE® Anti-Friction Coatings: Smart Lubricationâ„¢ solutions for automotive and industrial applications

Hydrogen-ready lubricants from MOLYKOTE®

MOLYKOTE® P-3700 Anti-Seize Paste: High-purity solid lubricant paste for bolted joints used in high-temperature environments including steam & gas

MOLYKOTE® HP-300 Grease protects critical inverter electrical connections – Case Study

MOLYKOTE® specialty lubricant improves reliability of rotary steerable drilling equipment: MOLYKOTE® P-37 Anti-Seize Paste reduces thread failures – Case Study

MOLYKOTE® G-N Metal Assembly Paste used to avoid microwelding of pipes in rock-drilling machines – Application Profile

MOLYKOTE® 111 Compound provides food- and water-contact-approved O-ring lubrication and sealing in SWRO desalination – Application Profile

Featured Kalrez® Video